SPIRE Technical Solutions


ENCLOSURE, SHUTTER @ C WITH CLAMPED DEGAS @ E	Blank off shutter enclosure	Panel DEGAS cool down ITLK
Part Number: 0020-28255	Part Number: 0020-28293	Part Number: 0020-28584


Clamp P4 Magnet	ROBOT BLADE 8" HTHU TRANSFER	Spacer Pillow Block, K3/F4
Part Number: 0020-28589	Part Number: 0020-28622	Part Number: 0020-28646


Pin, Sensor/Guide K3/P4 Source	REAR STEP, CVD GAS BOX, BOTH SIDES	Block, Water
Part Number: 0020-28647	Part Number: 0020-28673	Part Number: 0020-28743


Plate, Cover	Cover, Knob IMP RF Match	SUPPORT SHELF, IMP RF POWER SUPPLY
Part Number: 0020-28744	Part Number: 0020-28931	Part Number: 0020-28939

Used