SPIRE Technical Solutions


Spacer, source guide pin	BRKT valve water	Flag Sensor Motorized Lift
Part Number: 0020-23837	Part Number: 0020-24057	Part Number: 0020-24063


Opto sensor mounting bracket	SENSOR FLAG MOUNTING POST	DUAL BLADE ROBOT WING SHAFT
Part Number: 0020-24064	Part Number: 0020-24065	Part Number: 0020-24185


Base Preclean 2	Hold chamber adapter mount	Mounting plate PC 2 RF match
Part Number: 0020-24230	Part Number: 0020-24257	Part Number: 0020-24291


Cover Safety Orienter @ POS #5	Cathode INTLK cover preclean 2	Cathode switch cover pre–clean
Part Number: 0020-24363	Part Number: 0020-24411	Part Number: 0020-24412

Used