SPIRE Technical Solutions


Pedestal CD/PT Wafer 150mm	Plate adapter clamp wide body	Preclean Lift Hoop
Part Number: 0020-22799	Part Number: 0020-22805	Part Number: 0020-22838


Pin, PCII lift	Bell jar adapter	shutter enclosure
Part Number: 0020-22839	Part Number: 0020-22848	Part Number: 0020-22879


Adapter, collimator source 13"	Insulator TiN 8" Wafer	Plate contact DC right TiN 8" wafer
Part Number: 0020-22950	Part Number: 0020-22975	Part Number: 0020-22979


Plate contact DC, left TiN 8" wafer	ADAPTER TIN 8” WAFER CHAMBER 16”	Bracket pillow block
Part Number: 0020-22980	Part Number: 0020-22982	Part Number: 0020-22983

Used