SPIRE Technical Solutions


Block Mnt, Shut Off, APTech	MFC mounting block, Brooks	ADAPTER 11.3" SOURCE WIDE BODY CHAMBER
Part Number: 0020-22542	Part Number: 0020-22543	Part Number: 0020-22547


Plate blankoff shutter arm	Plate blankoff MGN coupling	Collimator, bracket guide source
Part Number: 0020-22548	Part Number: 0020-22549	Part Number: 0020-22551


Spacer source guide pin, wide	PANEL PCB MOUNTING N2 HEATER	Cassette Support
Part Number: 0020-22664	Part Number: 0020-22711	Part Number: 0020-22739


Pedestal CD/PT Wafer 150mm	Plate adapter clamp wide body	Pin, PCII lift
Part Number: 0020-22799	Part Number: 0020-22805	Part Number: 0020-22839

Used