SPIRE Technical Solutions


Plate contact DC source 13" R	Plate contact DC source 13" left	Plate contact DC source 11.3" left
Part Number: 0020-21482	Part Number: 0020-21485	Part Number: 0020-21486


Plate contact, DC source 11.3" right	Insulator Source 13"	Loadlock shield bracket
Part Number: 0020-21488	Part Number: 0020-21664-U	Part Number: 0020-21674


ARM, Lifter, Degas/ orienter	Lifter 6"	Chuck Orienter 6"
Part Number: 0020-21675	Part Number: 0020-21705	Part Number: 0020-21706


8" Orienter Lifter	8" Orienter Chuck	Collimator spacer pillow block
Part Number: 0020-21707	Part Number: 0020-21708	Part Number: 0020-21713-U

Used