SPIRE Technical Solutions


Plate contact, DC source 11.3" right	Insulator Source 13"	Loadlock shield bracket
Part Number: 0020-21488	Part Number: 0020-21664-U	Part Number: 0020-21674


ARM, Lifter, Degas/ orienter	Lifter 6"	Chuck Orienter 6"
Part Number: 0020-21675	Part Number: 0020-21705	Part Number: 0020-21706


8" Orienter Lifter	8" Orienter Chuck	Collimator spacer pillow block
Part Number: 0020-21707	Part Number: 0020-21708	Part Number: 0020-21713-U


PLUG, CVD/MONOLITH INTERFACE	Flange, Blankoff CCD	Flange, Blankoff Rotation
Part Number: 0020-21716	Part Number: 0020-21779	Part Number: 0020-21780

Used