SPIRE Technical Solutions


Spacer, Rear Step	Base CD/PT 150mm	Hoop CD/PT 150mm
Part Number: 0020-21214	Part Number: 0020-21219	Part Number: 0020-21222


Turbo support shelf	Wafer orienter shaft guide	Cover lift A/B
Part Number: 0020-21251	Part Number: 0020-21261	Part Number: 0020-21265


Flat cover, chamber interconnect	Insulator, RF connector DC bia	RGA BLANK OFF
Part Number: 0020-21266	Part Number: 0020-21404-U	Part Number: 0020-21436


Plate contact DC source 13" R	Plate contact DC source 13" left	Plate contact DC source 11.3" left
Part Number: 0020-21482	Part Number: 0020-21485	Part Number: 0020-21486

Used