SPIRE Technical Solutions


Protective window	Shield cryo round	SHLD HTR RF BOT
Part Number: 0020-20499-U	Part Number: 0020-20500	Part Number: 0020-20508


Heater housing	SHLD HTR RF top	Clr Clamp Htr Isolater
Part Number: 0020-20510	Part Number: 0020-20512	Part Number: 0020-20514-U


Cap, lamp feedthru Used	Blank, Flange, Process Chamber, Monolith	Bracket motor brushless
Part Number: 0020-20523-U	Part Number: 0020-20557	Part Number: 0020-20575


Insert, slit valve machined	Strip hold down 10 channel gas box	Gasket 10 channel gasbox
Part Number: 0020-20587	Part Number: 0020-20595	Part Number: 0020-20596

Used