SPIRE Technical Solutions


Brkt Block Valve Low K HDPCVD	Wedge, Side Coil Tensioner	Thermal gasket, cold plate .060" GRAFOIL
Part Number: 0020-18384	Part Number: 0020-18442	Part Number: 0020-18577


DIAL COVER, SIDE LOCAL MATCH, HDPCVD, ULTIMA	Handle, Lid Plate HDPCVD, Ultima	BLOCK, GAS LINES, BOTTOM MOUNT, 2 OF 2
Part Number: 0020-18698	Part Number: 0020-18701	Part Number: 0020-18904


Bulkhead Mount, Wafer Temp Probe, Ultima HDPCVD	Strain Releif, WTM, Ultima, HDPCVD	COVER, SHIELD CATHODE BASE LIFT, ULTIMA
Part Number: 0020-18929	Part Number: 0020-18930	Part Number: 0020-18949


Panel Chamber Distribution	Heater, isolator ceramic	BRKT, pillow block source
Part Number: 0020-20085	Part Number: 0020-20123	Part Number: 0020-20156

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