SPIRE Technical Solutions


KIT, LCF BRKT CHAMBER PORT STANDARD CENTURA AP	KIT,ROBOT ELBOW BEARING	COLLAR,150MM,ULTIMA HDP-CVD
Part Number: 0246-00494	Part Number: 0270-00466	Part Number: 0270-18074


8" PVD hoop to heat alignment JIG	Tool Zero Position	Tool bellows align, HT BESC. 1.574" DIA shaft
Part Number: 0270-20056	Part Number: 0270-20080-N	Part Number: 0270-20320


Align Fixture Wafer Handler	CENTER ALIGNMENT PERP JIG	Robot cal tool 1/8” shim plate
Part Number: 0270-70008	Part Number: 0270-70043	Part Number: 0270-70056


Align Fixture Wafer Handler	Cable ASSY ON–BD power L–15ft	Cable ASSY 6ft DB9–female/DB25
Part Number: 0270-7008	Part Number: 0620-02271-N	Part Number: 0620-02384

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