SPIRE Technical Solutions


Endura Neslab	Oring .362 X .103 4079CUT KALR	Spacer, Wafer Cylinder CZ SC513
Part Number: 0190-20058	Part Number: 0190-35206	Part Number: 0190-35385


COVER RING, 8" IMP/BESC CERAMIC W/AL ARC REV 002	DEP RING, 8" SNNF	Filter, Slit Window, Quartz
Part Number: 0200-00673	Part Number: 0200-00674	Part Number: 0200-09772


Ring, pedestal, ESC	Liner, Junction, SiN, DxZ, GEC	Pin, wafer lift, centura, DXZ
Part Number: 0200-09830	Part Number: 0200-10157	Part Number: 0200-10162


Guide, Lift Pin	NOZZLE, CERAMIC 1.76L CENTER HDPCVD, ULTIMA	Nozzle, all ceramic 3.05L, 1.5% HDPCVD
Part Number: 0200-18053	Part Number: 0200-18082	Part Number: 0200-18092

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