SPIRE Technical Solutions


SMC HE particle filter hot loop, 20 UM A	Endura Neslab	Oring .362 X .103 4079CUT KALR
Part Number: 0190-18425	Part Number: 0190-20058	Part Number: 0190-35206


Spacer, Wafer Cylinder CZ SC513	COVER RING, 8" IMP/BESC CERAMIC W/AL ARC REV 002	DEP RING, 8" SNNF
Part Number: 0190-35385	Part Number: 0200-00673	Part Number: 0200-00674


Filter, Slit Window, Quartz	Ring, pedestal, ESC	Liner, Junction, SiN, DxZ, GEC
Part Number: 0200-09772	Part Number: 0200-09830	Part Number: 0200-10157


Pin, wafer lift, centura, DXZ	Guide, Lift Pin	NOZZLE, CERAMIC 1.76L CENTER HDPCVD, ULTIMA
Part Number: 0200-10162	Part Number: 0200-18053	Part Number: 0200-18082

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