SPIRE Technical Solutions


Bracket, LCF lid lift, buffer/transfer lid hoist	Corner, front, lid hoist test fixture	Corner, rear, lid hoist test fixture
Part Number: 0040-46058	Part Number: 0040-46175	Part Number: 0040-46176


cover, baseplate, exhaust bottom	Cover AC Box CKT Brkrs CVD REM Gasbox	200mm Insert Barrier HDP-CVD Ultima
Part Number: 0040-46907	Part Number: 0040-70202	Part Number: 0040-76858


WELDMENT SLIT VALVE INSERT ISSG CHAMBER	Cover Assy, Top RPS	Cover Assy Bottom
Part Number: 0040-82474	Part Number: 0040-85938-N	Part Number: 0040-85939-N


Bellows Assy Upper Mag Coupled Rotation	Lower Mag Coupled Rotation Bellows	WELDMENT, APPLICATOR PURGULTIMA HDPCVD
Part Number: 0040-87019	Part Number: 0040-87020	Part Number: 0050-00930

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