SPIRE Technical Solutions


OutRGGR, front panel, RTP NEW	COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA	Cover, rotation, rear, RTP chamber
Part Number: 0020-39278-N	Part Number: 0020-39397	Part Number: 0020-39407


Cover, rotation, left, RTP chamber	PLUG, HOLE	Bracket, wafer detector
Part Number: 0020-39409	Part Number: 0020-40164	Part Number: 0020-40711


PLATE, PUMPING, 8" SR, WXZ	Thermal Gasket Heater Block	MANIFOLD, WATER RETURN AMAT 0
Part Number: 0020-42079	Part Number: 0020-53525	Part Number: 0020-70190


MANIFOLD,WATER SUPPLY AMAT 0	BLADE 8 INCH, BUFFER FROG LEG	Bracket, Motor, Rotation, Orienter, Wafer
Part Number: 0020-70191	Part Number: 0020-70285-S	Part Number: 0020-70343

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