SPIRE Technical Solutions


Bracket, Bottom	Shaft, Lifter TC	8" Chuck, TC
Part Number: 0020-21002	Part Number: 0020-22363	Part Number: 0020-22414


Bushing Guide	Hardstop, buffer/ transfer lid hoist	View port, HDP–CVD Non-Anodized Alum
Part Number: 0020-29077	Part Number: 0020-17523	Part Number: 0020-18303


Cap, lamp feedthru	Cover, rotation, rear, RTP chamber	Cover, rotation, left, RTP chamber
Part Number: 0020-20523-N	Part Number: 0020-39407	Part Number: 0020-39409


Bracket, shut–off valve, inlet	Bracket, shut–off valve, outlet	Spacer, bracket, shut–off valve
Part Number: 0020-70718	Part Number: 0020-70719	Part Number: 0020-70720

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